Mitrovic, IZ ORCID: 0000-0003-4816-8905, Supardan, SN, Hesp, D, Dhanak, VR, Hall, S ORCID: 0000-0001-8387-1036, Schamm-Chardon, S, Dentoni Litta, E, Hellstrom, P-E and Ostling, M
(2016)
Structure of the interface in sub-nm EOT TmSiO/HfO2 gate stack.
In: 19th Workshop on Dielectrics in Microelectronics –WODIM 2016, 2016-6-27 - 2016-6-30, Catania, Italy.
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Mitrovic et al-WoDim2016-ff.pdf - Author Accepted Manuscript Download (309kB) |
Item Type: | Conference or Workshop Item (Unspecified) |
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Depositing User: | Symplectic Admin |
Date Deposited: | 30 Jun 2016 15:13 |
Last Modified: | 19 Jan 2023 07:35 |
URI: | https://livrepository.liverpool.ac.uk/id/eprint/3001882 |
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