Rare-earth oxide interfacial layer for sub-nm EOT CMOS technology

Supardan, S, Mitrovic, IZ ORCID: 0000-0003-4816-8905, Hesp, D, Dhanak, VR, Hall, S ORCID: 0000-0001-8387-1036, Schamm-Chardon, S, Dentoni Litta, E, Hellstrom, P-E and Ostling, M (2016) Rare-earth oxide interfacial layer for sub-nm EOT CMOS technology. In: 3rd International Conference on Nanotechnology, Nanomaterials and Thin Films for Energy Applications, 2016-7-27 - 2016-7-29, University of Liverpool.

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