Ryan, Peter J, Bradley, James W 
ORCID: 0000-0002-8833-0180 and Bowden, Mark D ORCID: 0000-0003-4128-4823
(2019)
Comparison of Langmuir probe and laser Thomson scattering for electron property measurements in magnetron discharges.
Physics of Plasmas, 26 (7).
073515-.
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Ryan et al Thomson-probe-magnetron (PhysicsOfPlasmas).pdf - Author Accepted Manuscript Download (1MB) | Preview |
Abstract
Electron property measurements made by Langmuir probe and laser Thomson scattering have been compared in weakly magnetized plasma conditions using a planar unbalanced magnetron with the aim of assessing the accuracy of the probe diagnostic. Measurements were performed at several locations within the magnetic field configuration; the magnetic null region (. 1 mT) on the discharge axis and inside the last closed flux surface boundary with fields up to 33 mT. There was good diagnostic agreement during High Power Impulse Magnetron Sputtering (HiPIMS) but significant discrepancies were observed for DC magnetron operation, even at the magnetic null. For some discharge conditions, the electron density determined by Thomson scattering was over an order of magnitude greater than the plasma density obtained from the Langmuir probe, using both ion and electron collection theories. In addition, the low energy part of the electron energy distribution function determined by the probe was depleted. The possible reasons for the discrepancies are discussed, with the conclusion being that the plasma was significantly perturbed by the probe stem. The range of plasma density and electron temperature measured in the study were 0.4-5.4 x 1017 m 3 and 0.2-5.9 eV, respectively.
| Item Type: | Article |
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| Depositing User: | Symplectic Admin |
| Date Deposited: | 19 Aug 2019 10:19 |
| Last Modified: | 15 Mar 2024 03:13 |
| DOI: | 10.1063/1.5109621 |
| Related URLs: | |
| URI: | https://livrepository.liverpool.ac.uk/id/eprint/3052122 |
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