Marshall, Paul Andrew
(2005)
Liquid injection MOCVD of hafnium oxide, silicate and aluminate high-k dielectrics.
PhD thesis, University of Liverpool.
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| Item Type: | Thesis (PhD) |
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| Uncontrolled Keywords: | Engineering, Materials |
| Depositing User: | Repository Admin |
| Date Deposited: | 11 Jan 2022 14:55 |
| Last Modified: | 11 Jan 2022 14:58 |
| DOI: | 10.17638/03146559 |
| Copyright Statement: | Copyright © and Moral Rights for this thesis and any accompanying data (where applicable) are retained by the author and/or other copyright owners. A copy can be downloaded for personal non-commercial research or study, without prior permission or charge. |
| Digitisation Notes : | No issues with pagination. No missing pages in annexes / appendices. |
| URI: | https://livrepository.liverpool.ac.uk/id/eprint/3146559 |
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