Gate dielectrics for ULSI produced by plasma anodisation

KENNEDY, Gary Paul (1992) Gate dielectrics for ULSI produced by plasma anodisation. PhD thesis, University of Liverpool.

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Item Type:	Thesis (PhD)
Uncontrolled Keywords:	Engineering
Depositing User:	Repository Admin
Date Deposited:	11 Jan 2022 16:34
Last Modified:	11 Jan 2022 16:36
DOI:	10.17638/03146583
Copyright Statement:	Copyright © and Moral Rights for this thesis and any accompanying data (where applicable) are retained by the author and/or other copyright owners. A copy can be downloaded for personal non-commercial research or study, without prior permission or charge.
Digitisation Notes :	10 unnumbered pages before page 1. 2 unnumbered pages between pages 11-12. Unnumbered page between pages 34-35. 2 unnumbered pages between pages 36-37. Unnumbered page between pages 38-39. Unnumbered page between pages 39-40. 2 unnumbered pages between pages 40-41. Unnumbered page between pages 44-45. 2 unnumbered pages between pages 46-47. Unnumbered page between pages 47-48. Unnumbered page between pages 49-50. 3 unnumbered pages between pages 53-54. 2 unnumbered pages between pages 54-55. Unnumbered page between pages 55-56. Unnumbered page between pages 62-63. 2 unnumbered pages between pages 63-64. Unnumbered page between pages 64-65. Unnumbered page between pages 65-66. Unnumbered page between pages 66-67. Unnumbered page between pages 67-68. Unnumbered page between pages 68-69. Unnumbered page between pages 69-70. 3 unnumbered pages between pages 72-73. Unnumbered page between pages 74-75. 2 unnumbered pages between pages 75-76. Unnumbered page between pages 76-77. 3 unnumbered pages between pages 77-78. 3 unnumbered pages between pages 78-79. 2 unnumbered pages between pages 79-80. Unnumbered page between pages 81-82. 3 unnumbered pages between pages 82-83. Unnumbered page between pages 92-93. Unnumbered page between pages 93-94. Unnumbered page between pages 94-95. Unnumbered page between pages 101-102. 3 unnumbered pages between pages 102-103. Unnumbered page between pages 103-104. Unnumbered page between pages 105-106. Unnumbered page between pages 107-108. 3 unnumbered pages between pages 108-109. Unnumbered page between pages 109-110. 2 unnumbered pages between pages 110-111. Unnumbered page between pages 112-113. Unnumbered page between pages 114-115. 3 unnumbered pages between pages 115-116. 2 unnumbered pages between pages 116-117. Unnumbered page between pages 117-118. Unnumbered page between pages 118-119. 2 unnumbered pages between pages 119-120. Unnumbered page between pages 129-130. 2 unnumbered pages between pages 132-133. 2 unnumbered pages between pages 134-135. Unnumbered page between pages 135-136. 2 unnumbered pages between pages 137-138. 2 unnumbered pages between pages 138-139. Unnumbered page between pages 140-141. 2 unnumbered pages between pages 142-143. Unnumbered page between pages 143-144. Unnumbered page between pages 144-145. 6 unnumbered pages between pages 156-157. 3 unnumbered pages between pages 157-158. 3 unnumbered pages between pages 158-159. 6 unnumbered pages between pages 159-160. 9 unnumbered pages after page 160.
URI:	https://livrepository.liverpool.ac.uk/id/eprint/3146583