Anang, Frank Eric Boye, Wei, Xuanwei, Xu, Jiushuai, Cain, Markys 
ORCID: 0000-0002-8413-3104, Li, Zhi, Brand, Uwe and Peiner, Erwin
(2024)
Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting.
Micromachines, 15 (2).
p. 261.
Abstract
In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modeling (FEM) of a single NW using COMSOL Multiphysics at an applied axial force of 0.9 nN, which corresponded to the experimental condition, resulted in a voltage potential of -6.5 mV. The process repeated with the same pattern design using a layer of SU-8 polymer on the NWs yielded a much higher maximum peak output voltage of ~21.6 mV and a corresponding peak power density of 0.22 µW/cm<sup>3</sup>, independent of the size of the NW array. The mean values of the measured output voltage and FEM showed good agreement and a nearly linear dependence on the applied force on a 3 × 3 µm<sup>2</sup> NW array area in the range of 20 to 90 nN.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | CBD growth, MEMS, PENG, SU-8 polymer, ZnO nanowire arrays, area-selective growth |
| Divisions: | Faculty of Science and Engineering > School of Physical Sciences |
| Depositing User: | Symplectic Admin |
| Date Deposited: | 06 Mar 2024 10:07 |
| Last Modified: | 06 Mar 2024 10:07 |
| DOI: | 10.3390/mi15020261 |
| Open Access URL: | https://doi.org/10.3390/mi15020261 |
| Related URLs: | |
| URI: | https://livrepository.liverpool.ac.uk/id/eprint/3179146 |
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