The use of segmented cathodes to determine the spoke current density distribution in high power impulse magnetron sputtering plasmas



Poolcharuansin, Phitsanu, Estrin, Francis Lockwood and Bradley, James W
(2015) The use of segmented cathodes to determine the spoke current density distribution in high power impulse magnetron sputtering plasmas. JOURNAL OF APPLIED PHYSICS, 117 (16).

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Item Type: Article
Subjects: ?? QC ??
Depositing User: Symplectic Admin
Date Deposited: 14 Aug 2015 08:02
Last Modified: 10 Aug 2022 06:11
DOI: 10.1063/1.4918720
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/2020399