Tungsten nanostructure formation in a magnetron sputtering device

Petty, TJ and Bradley, JW ORCID: 0000-0002-8833-0180 (2014) Tungsten nanostructure formation in a magnetron sputtering device Journal of Nuclear Materials, 453 (1-3). pp. 320-322. ISSN 0022-3115, 1873-4820

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Abstract

He⁺ ion induced tungsten nanostructure (tungsten fuzz) has been created for the first time in a magnetron sputtering device. The nanostructure was formed on a W substrate facing the target, the sample surface temperature was held at 1000 K, with an incident ion energy of 56.5 eV, and a helium ion fluence of 2.4 × 10²⁴ m^-2. © 2014 Elsevier B.V. All rights reserved.

Item Type:	Article
Additional Information:	## TULIP Type: Articles/Papers (Journal) ##
Uncontrolled Keywords:	fUZZY W
Subjects:	?? QC ??
Divisions:	Faculty of Science & Engineering > School of Electrical Engineering, Electronics and Computer Science
Depositing User:	Symplectic Admin
Date Deposited:	10 Nov 2015 08:53
Last Modified:	01 Mar 2026 01:00
DOI:	10.1016/j.jnucmat.2014.07.023
Related Websites:	Author Publisher
URI:	https://livrepository.liverpool.ac.uk/id/eprint/2036140
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