Investigation of atmospheric-pressure plasma discharges for thin film deposition



Bless, Frédéric
(2015) Investigation of atmospheric-pressure plasma discharges for thin film deposition. PhD thesis, University of Liverpool.

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Abstract

Gas-phase polymerisation of different monomers has been studied for an atmospheric plasma jet predominantly using quadrupole mass spectrometry. Thin film depositions were made and analysed using XPS and TOF-SIMS. Time-resolved and time-averaged measurements were performed to understand more deeply the paths of plasma polymerisation at atmospheric pressure and in ambient air. Continuous wave and pulse DC jets were both investigated. Results show the importance of positive ions in polymerisation and support the step growth formation for the creation of heavy oligomers. Negative ions are also important and depend far more on the signal frequency, more precisely on the off-time duration, than the positive ions. Another study was performed on an adaptable plasma system for atomic layer deposition allowing deposition of oxides at room temperature. Results show a high quality of Al2O3 films realised at room temperature with air as an oxygen-rich gas with the use of a custom-built surface discharge plasma reactor.

Item Type: Thesis (PhD)
Subjects: Q Science > QC Physics
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Depositing User: Symplectic Admin
Date Deposited: 30 Aug 2016 15:56
Last Modified: 30 Aug 2016 15:56
URI: http://livrepository.liverpool.ac.uk/id/eprint/2050119
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