Control of threshold voltage in E-mode and D-mode GaN-on-Si metal-insulator-semiconductor heterostructure field effect transistors by in-situ fluorine doping of atomic layer deposition Al2O3 gate dielectrics

Roberts, Joseph, Chalker, Paul, Lee, Kean Boon, Houston, Peter, Cho, S Jin, Thayne, Iain, Guiney, Iver, Wallis, David and Humphreys, Colin (2016) Control of threshold voltage in E-mode and D-mode GaN-on-Si metal-insulator-semiconductor heterostructure field effect transistors by in-situ fluorine doping of atomic layer deposition Al2O3 gate dielectrics. Applied Physics Letters, 108 (7). 072901-.

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Official URL: https://aip.scitation.org/doi/10.1063/1.4942093

Abstract

We report the modification and control of threshold voltage in enhancement and depletion mode AlGaN/GaN metal insulator-semiconductor heterostructure field effect transistors through the use of in-situ fluorine doping of atomic layer deposition Al2O3. Uniform distribution of F ions throughout the oxide thickness are achievable, with a doping level of up to 5.5x1019cm-3 as quantified by secondary ion mass spectrometry. This fluorine doping level reduces capacitive hysteretic effects when exploited in GaN metal-oxide-semiconductor capacitors. The fluorine doping and forming gas anneal also induces an average positive threshold voltage shift of between 0.75 and 1.36V in both enhancement mode and depletion mode GaN-based transistors compared with the undoped gate oxide via a reduction of positive fixed charge in the gate oxide from +4.67x1012 cm-2 to -6.60x1012 cm-2. The application of this process in GaN based power transistors advances the realisation of normally off, high power, high speed devices.

Item Type:	Article
Uncontrolled Keywords:	40 Engineering, 51 Physical Sciences, 5104 Condensed Matter Physics
Subjects:	?? QC ?? ?? QD ??
Depositing User:	Symplectic Admin
Date Deposited:	04 Mar 2016 08:54
Last Modified:	21 Jun 2024 02:57
DOI:	10.1063/1.4942093
Related URLs:	Author Publisher
URI:	https://livrepository.liverpool.ac.uk/id/eprint/2053524