Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma



Klein, P, Estrin, F Lockwood, Hnilica, J, Vasina, P and Bradley, JW
(2017) Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 50 (1).

[img] Text
paper_v7p.pdf - Accepted Version

Download (5MB)
Item Type: Article
Uncontrolled Keywords: magnetron sputtering, HiPIMS, spokes, spoke model
Depositing User: Symplectic Admin
Date Deposited: 18 Oct 2016 08:43
Last Modified: 15 Sep 2022 12:05
DOI: 10.1088/1361-6463/50/1/015209
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3003830