Where physics meets chemistry: Thin film deposition from reactive plasmas



Michelmore, Andrew, Whittle, Jason D, Bradley, James W and Short, Robert D
(2016) Where physics meets chemistry: Thin film deposition from reactive plasmas. FRONTIERS OF CHEMICAL SCIENCE AND ENGINEERING, 10 (4). 441 - 458.

[img] Text
FCSE Review Editorial Revision.docx - Accepted Version

Download (534kB)
Item Type: Article
Uncontrolled Keywords: thin films, plasma physics, plasma chemistry, functionalization, polymer
Depositing User: Symplectic Admin
Date Deposited: 20 Jan 2017 08:24
Last Modified: 18 Aug 2022 14:10
DOI: 10.1007/s11705-016-1598-7
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3005299