(Invited) Vacuum Ultraviolet Photochemical Atomic Layer Deposition of Alumina and Titania Films



Chalker, PR ORCID: 0000-0002-2295-6332, Marshall, PA, Dawson, K ORCID: 0000-0003-3249-8328, Sutcliffe, CJ, Brunell, IF, Sedghi, N ORCID: 0000-0002-2004-6159, Hall, S ORCID: 0000-0001-8387-1036 and Potter, RJ ORCID: 0000-0003-0896-4536
(2015) (Invited) Vacuum Ultraviolet Photochemical Atomic Layer Deposition of Alumina and Titania Films. ECS Transactions, 69 (7). 139 - 145.

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Item Type: Article
Depositing User: Symplectic Admin
Date Deposited: 09 Feb 2017 11:43
Last Modified: 09 Jan 2021 07:43
DOI: 10.1149/06907.0139ecst
URI: https://livrepository.liverpool.ac.uk/id/eprint/3005663