Chalker, PR ORCID: 0000-0002-2295-6332, Marshall, PA, Dawson, K
ORCID: 0000-0003-3249-8328, Sutcliffe, CJ, Brunell, IF, Sedghi, N
ORCID: 0000-0002-2004-6159, Hall, S
ORCID: 0000-0001-8387-1036 and Potter, RJ
ORCID: 0000-0003-0896-4536
(2015)
(Invited) Vacuum Ultraviolet Photochemical Atomic Layer Deposition of Alumina and Titania Films.
ECS Transactions, 69 (7).
139 - 145.
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ecst_Chalker_U Liverpool.pdf - Accepted Version Download (479kB) |
Item Type: | Article |
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Depositing User: | Symplectic Admin |
Date Deposited: | 09 Feb 2017 11:43 |
Last Modified: | 09 Jan 2021 07:43 |
DOI: | 10.1149/06907.0139ecst |
URI: | https://livrepository.liverpool.ac.uk/id/eprint/3005663 |
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