Particle-balance models for pulsed sputtering magnetrons



Huo, Chunqing, Lundin, D, Gudmundsson, JT, Raadu, MA, Bradley, JW and Brenning, N
(2017) Particle-balance models for pulsed sputtering magnetrons. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 50 (35).

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Item Type: Article
Uncontrolled Keywords: magnetron sputtering, HiPIMS, magnetron sputtering discharge, global model, secondary electron emission
Depositing User: Symplectic Admin
Date Deposited: 29 Aug 2017 10:00
Last Modified: 18 Aug 2022 16:12
DOI: 10.1088/1361-6463/aa7d35
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3009199