Elucidation of ALD MgZnO deposition processes using low energy ion scattering



Werner, Matthew, Roberts, Joseph W, Potter, Richard J ORCID: 0000-0003-0896-4536, Dawson, Karl ORCID: 0000-0003-3249-8328 and Chalker, Paul R ORCID: 0000-0002-2295-6332
(2018) Elucidation of ALD MgZnO deposition processes using low energy ion scattering. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36 (2).

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EMRS 2017 JVST_A revised submission r2 final.doc - Accepted Version

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Item Type: Article
Depositing User: Symplectic Admin
Date Deposited: 08 May 2018 15:31
Last Modified: 09 Jan 2021 05:30
DOI: 10.1116/1.5015958
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3021068