Werner, Matthew, Roberts, Joseph W, Potter, Richard J 
ORCID: 0000-0003-0896-4536, Dawson, Karl ORCID: 0000-0003-3249-8328 and Chalker, Paul R ORCID: 0000-0002-2295-6332
(2018)
Elucidation of ALD MgZnO deposition processes using low energy ion scattering.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36 (2).
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EMRS 2017 JVST_A revised submission r2 final.doc - Accepted Version Download (7MB) |
| Item Type: | Article |
|---|---|
| Depositing User: | Symplectic Admin |
| Date Deposited: | 08 May 2018 15:31 |
| Last Modified: | 09 Jan 2021 05:30 |
| DOI: | 10.1116/1.5015958 |
| Related URLs: | |
| URI: | https://livrepository.liverpool.ac.uk/id/eprint/3021068 |
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