Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited via Atomic Layer Deposition



Peek, Benjamin
(2019) Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited via Atomic Layer Deposition. Doctor of Philosophy thesis, University of Liverpool.

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Item Type: Thesis (Doctor of Philosophy)
Divisions: Fac of Science & Engineering > School of Engineering
Depositing User: Symplectic Admin
Date Deposited: 13 Aug 2020 13:16
Last Modified: 09 Jan 2021 02:39
DOI: 10.17638/03066707
Supervisors:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3066707