Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited via Atomic Layer Deposition



Peek, Benjamin
(2019) Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited via Atomic Layer Deposition. Doctor of Philosophy thesis, University of Liverpool.

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Item Type: Thesis (Doctor of Philosophy)
Divisions: Faculty of Science and Engineering > School of Engineering
Depositing User: Symplectic Admin
Date Deposited: 13 Aug 2020 13:16
Last Modified: 03 Aug 2022 00:13
DOI: 10.17638/03066707
Supervisors:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3066707