Investigation of Anomalous Capacitance-Voltage Behavior Caused by Interface Dipoles and the Effect of Post-Metal-Annealing


Lu, Qifeng, Zhao, Ce Zhou, Zhao, Chun, Taylor, Steve and Chalker, Paul R ORCID: 0000-0002-2295-6332 (2017) Investigation of Anomalous Capacitance-Voltage Behavior Caused by Interface Dipoles and the Effect of Post-Metal-Annealing. .

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Item Type: Conference or Workshop Item (Unspecified)
Uncontrolled Keywords: Anomalous capacitance-voltage, MOS, Zr(NMe2)(4)
Depositing User: Symplectic Admin
Date Deposited: 16 Jan 2020 15:48
Last Modified: 09 Jan 2021 09:47
DOI: 10.1063/1.4999875
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URI: https://livrepository.liverpool.ac.uk/id/eprint/3070874
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