Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process

Kulczyk-Malecka, Justyna, Donaghy, David, Delfour-Peyrethon, Brice, Werner, Matthew, Chalker, Paul R ORCID: 0000-0002-2295-6332, Bradley, James W and Kelly, Peter J (2020) Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process. Journal of Vacuum Science & Technology A, 38 (3). 033410 - 033410.

Text JVA20-AR-SR2020-00083.pdf - Accepted Version Access to this file is embargoed until 22 April 2021. Download (3MB)