Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process



Kulczyk-Malecka, Justyna, Donaghy, David, Delfour-Peyrethon, Brice, Werner, Matthew, Chalker, Paul R ORCID: 0000-0002-2295-6332, Bradley, James W and Kelly, Peter J
(2020) Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process. Journal of Vacuum Science & Technology A, 38 (3). 033410 - 033410.

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JVA20-AR-SR2020-00083.pdf - Accepted Version
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Item Type: Article
Depositing User: Symplectic Admin
Date Deposited: 28 Apr 2020 09:19
Last Modified: 09 Jan 2021 02:13
DOI: 10.1116/6.0000118
URI: https://livrepository.liverpool.ac.uk/id/eprint/3085112