Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors

Massabuau, Fabien, Roberts, JW, Nicol, D, Edwards, PR, McLelland, M, Dallas, GL, Hunter, DA, Nicolson, EA, Jarman, JC, Kovacs, A
et al (show 3 more authors) (2021) Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors. In: Oxide-based Materials and Devices XII, 2021-3-6 - 2021-3-12.

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Atomic layer deposition (ALD) offers a low thermal budget method for producing α-Ga2O3films on sapphire substrate. In this paper we review the recent progress on plasma-enhanced ALD growth of α-Ga2O3and present the optical and photoconductive properties of the deposited films. We show that the deposited material exhibits an epitaxial relationship with the sapphire substrate, and with an atomically sharp film-substrate interface. The α-Ga2O3films had an optical bandgap energy measured at 5.11 eV, and exhibited a broad luminescence spectrum dominated by ultraviolet, blue and green bands, in line with current literature. We finally demonstrate the suitability of the material for solar-blind photodetection.

Item Type: Conference or Workshop Item (Unspecified)
Divisions: Faculty of Science and Engineering > School of Engineering
Depositing User: Symplectic Admin
Date Deposited: 25 Jun 2021 08:43
Last Modified: 18 Jan 2023 21:37
DOI: 10.1117/12.2588729
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