Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe



Poolcharuansin, Phitsanu, Chingsungnoen, Artit, Pasaja, Nitisak, Horprathum, Mati and Bradley, James W
(2021) Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe. Vacuum, 194. 110549 - 110549.

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Item Type: Article
Divisions: Faculty of Science and Engineering > School of Electrical Engineering, Electronics and Computer Science
Depositing User: Symplectic Admin
Date Deposited: 20 Sep 2021 08:02
Last Modified: 26 Aug 2022 00:10
DOI: 10.1016/j.vacuum.2021.110549
URI: https://livrepository.liverpool.ac.uk/id/eprint/3137588