Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe

Poolcharuansin, Phitsanu, Chingsungnoen, Artit, Pasaja, Nitisak, Horprathum, Mati and Bradley, James W ORCID: 0000-0002-8833-0180 (2021) Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe Vacuum, 194. p. 110549. ISSN 0042-207X, 1879-2715

Text 2 Accepted Manuscript.docx - Author Accepted Manuscript Download (3MB)

Abstract

The flux of negative oxygen ions in a dc reactive magnetron discharge has been measured using a specially developed magnetic-filtering probe. The gridded probe which operates as a retarding field analyzer has a magnetic filter attached to the front entrance to suppress plasma electrons entering the device. As a result, the fluxes of unmagnetized negative ions with energies of higher than ~10 eV can arrive to an ion collector and contribute to the detected probe current. During the oxide mode of Ti–Ar/O<inf>2</inf> magnetron sputtering discharge, the measured negative ion flux is considered to be contributed by the sputtered O⁻ ions generated at the target surface and the plasma O⁻ ions created in the discharge volume. However, in specific discharge conditions, the sputtered ions are likely to dominate in the measured flux signal. As a result, the yield of the sputtered O⁻ ions and associated energy flux can be examined. The magnetic-filtering probe could potentially be employed as a real-time diagnostic tool to monitor the sputtered O⁻ flux as well as the oxide state of the target surface during reactive magnetron sputtering processes.

Item Type:	Article
Uncontrolled Keywords:	Reactive magnetron sputtering, Negative ions, Ion flux probe, Target poisoning
Divisions:	Faculty of Science & Engineering > School of Electrical Engineering, Electronics and Computer Science
Depositing User:	Symplectic Admin
Date Deposited:	20 Sep 2021 08:02
Last Modified:	01 Mar 2026 10:41
DOI:	10.1016/j.vacuum.2021.110549
Related Websites:	Author Publisher
URI:	https://livrepository.liverpool.ac.uk/id/eprint/3137588
Disclaimer:	The University of Liverpool is not responsible for content contained on other websites from links within repository metadata. Please contact us if you notice anything that appears incorrect or inappropriate.