Walk, F, Valizadeh, R and Bradley, JW 
ORCID: 0000-0002-8833-0180
(2022)
Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser
PLASMA SOURCES SCIENCE & TECHNOLOGY, 31 (6).
065002-065002.
ISSN 0963-0252, 1361-6595
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RFEA Paper -final -resubmit.pdf - Author Accepted Manuscript Download (1MB) | Preview |
Abstract
The time evolution of the positive ion energy distribution functions (IEDF’s) at the substrate position in an asymmetric bipolar high-power impulse magnetron sputtering (HiPIMS) system was determined using a gridded energy analyser. This was done for a range of operating conditions, namely the positive voltage U <inf>rev</inf> and ‘on-time’ negative pulse duration τ <inf>neg</inf>. The magnetron sputtering discharge was equipped with a Nb target. Based on the knowledge of the IEDF’s, the bombarding ion flux density Γ<inf>i</inf> and energy flux density Q <inf>i</inf> to a grounded surface were calculated. Time-resolved IEDF measurements showed that ions with energies approaching the equivalent of the positive pulse voltage U <inf>rev</inf> were generated as the reverse positive voltage phase developed. On time-average, we observed that increasing the set U <inf>rev</inf> value (from 0 to 100 V), resulted in a marginal decrease in the ion flux density Γ<inf>i</inf> to the analyser. However, this is accompanied by a five-fold increase in the ion energy flux density Q <inf>i</inf> compared to the unipolar, U <inf>rev</inf> = 0 V case. Reducing the negative HiPIMS pulse duration τ <inf>neg</inf> (from 130 to 40 μs) at a constant discharge power leads to a modest increase in Γ<inf>i</inf>, but a four-fold increase in Q <inf>i</inf>. The results reveal the benefit of the bipolar HiPIMS technique, in which it is possible to control and enhance the power density of ions bombarding a grounded (or fixed bias) substrate, for potentially better tailoring of thin film properties.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | bipolar pulsing, HiPIMS, ion energy analyser, ion energy distribution function, RFEA |
| Divisions: | Faculty of Science & Engineering > School of Electrical Engineering, Electronics and Computer Science |
| Depositing User: | Symplectic Admin |
| Date Deposited: | 23 Jun 2022 08:37 |
| Last Modified: | 24 Jan 2026 03:43 |
| DOI: | 10.1088/1361-6595/ac6a0d |
| Related Websites: | |
| URI: | https://livrepository.liverpool.ac.uk/id/eprint/3157032 |
| Disclaimer: | The University of Liverpool is not responsible for content contained on other websites from links within repository metadata. Please contact us if you notice anything that appears incorrect or inappropriate. |
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