Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser



Walk, F, Valizadeh, R and Bradley, JW
(2022) Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser. PLASMA SOURCES SCIENCE & TECHNOLOGY, 31 (6).

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Item Type: Article
Uncontrolled Keywords: bipolar pulsing, HiPIMS, ion energy analyser, ion energy distribution function, RFEA
Divisions: Faculty of Science and Engineering > School of Electrical Engineering, Electronics and Computer Science
Depositing User: Symplectic Admin
Date Deposited: 23 Jun 2022 08:37
Last Modified: 11 Aug 2022 03:12
DOI: 10.1088/1361-6595/ac6a0d
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3157032