A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma



Hickling, CJ ORCID: 0000-0003-0348-6926, Hall, S ORCID: 0009-0005-7433-7997, Harrison, JR ORCID: 0000-0003-2906-5097, Sharples, R ORCID: 0000-0003-3449-8583 and Bradley, JW ORCID: 0000-0002-8833-0180
(2024) A field programmable gate array based Langmuir probe system for measurement of plasma parameters at 500 kHz in a high-power impulse magnetron sputtering plasma Review of Scientific Instruments, 95 (3). 033503-. ISSN 0034-6748, 1089-7623

Access the full-text of this item by clicking on the Open Access link.

Abstract

By utilizing Field Programmable Gate Arrays in a configuration similar to that of the Mirror Langmuir Probe, it is possible to bias a single probe at three precise voltages in sequence. These voltages can be dynamically adjusted in real-time based on the measured plasma electron temperature to ensure the transition region is always sampled. The first results have been obtained by employing this method and have generated real-time outputs of electron temperature, ion saturation current, and floating potential on a low temperature pulsed-DC magnetron at 500 kHz. These results are in good agreement with the analysis of a conventionally swept Langmuir probe. This probe is designed with the intention of being implemented on MAST-U to aid in the study of exhaust physics and enable further investigation into filamentary behavior.

Item Type: Article
Uncontrolled Keywords: 40 Engineering, 4008 Electrical Engineering, 51 Physical Sciences
Depositing User: Symplectic Admin
Date Deposited: 15 Jul 2024 15:14
Last Modified: 28 Feb 2026 15:47
DOI: 10.1063/5.0174458
Open Access URL: https://doi.org/10.1063/5.0174458
Related Websites:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3182887
Disclaimer: The University of Liverpool is not responsible for content contained on other websites from links within repository metadata. Please contact us if you notice anything that appears incorrect or inappropriate.