Tungsten nanostructure formation in a magnetron sputtering device

Petty, TJ and Bradley, JW
(2014) Tungsten nanostructure formation in a magnetron sputtering device. JOURNAL OF NUCLEAR MATERIALS, 453 (1-3). pp. 320-322.

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He+ ion induced tungsten nanostructure (tungsten fuzz) has been created for the first time in a magnetron sputtering device. The nanostructure was formed on a W substrate facing the target, the sample surface temperature was held at 1000 K, with an incident ion energy of 56.5 eV, and a helium ion fluence of 2.4 × 1024 m-2. © 2014 Elsevier B.V. All rights reserved.

Item Type: Article
Additional Information: ## TULIP Type: Articles/Papers (Journal) ##
Uncontrolled Keywords: fUZZY W
Subjects: ?? QC ??
Divisions: Faculty of Science and Engineering > School of Electrical Engineering, Electronics and Computer Science
Depositing User: Symplectic Admin
Date Deposited: 10 Nov 2015 08:53
Last Modified: 15 Dec 2022 12:42
DOI: 10.1016/j.jnucmat.2014.07.023
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/2036140