Interface Engineering Routes for a Future CMOS Ge-based Technology

Mitrovic, IZ, Althobaiti, M, Weerakkody, AD, Sedghi, N, Hall, S, Dhanak, VR, Mather, S, Chalker, PR, Tsoutsou, D, Dimoulas, A
et al (show 4 more authors) (2014) Interface Engineering Routes for a Future CMOS Ge-based Technology. DIELECTRICS FOR NANOSYSTEMS 6: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING, 61 (2). pp. 73-88.

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<jats:p>We present an overview study of two germanium interface engineering routes, firstly a germanate formation via La<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> and Y<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub>, and secondly a barrier layer approach using Al<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> and Tm<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub>. The interfacial composition, uniformity, thickness, band gap, crystallinity, absorption features and valence band offset are determined using X-ray photoelectron spectroscopy, ultra violet variable angle spectroscopic ellipsometry, and high resolution transmission electron microscopy. The correlation of these results with electrical characterization data make a case for Ge interface engineering with rare-earth inclusion as a viable route to achieve high performance Ge CMOS.</jats:p>

Item Type: Article
Additional Information: ## TULIP Type: Articles/Papers (Journal) ##
Uncontrolled Keywords: 40 Engineering, 4008 Electrical Engineering, 4017 Mechanical Engineering, 4018 Nanotechnology
Depositing User: Symplectic Admin
Date Deposited: 07 Feb 2017 07:48
Last Modified: 20 Jun 2024 21:03
DOI: 10.1149/06102.0073ecst
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