Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited via Atomic Layer Deposition

Peek, Benjamin (2019) Mechanistic Insight and Properties of Metal Oxide Thin Films Deposited via Atomic Layer Deposition. Doctor of Philosophy thesis, University of Liverpool.

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Item Type:	Thesis (Doctor of Philosophy)
Divisions:	Faculty of Science and Engineering > School of Engineering
Depositing User:	Symplectic Admin
Date Deposited:	13 Aug 2020 13:16
Last Modified:	19 Jan 2023 00:12
DOI:	10.17638/03066707
Supervisors:	Chalker, Paul ORCID: 0000-0002-2295-6332 Potter, Richard ORCID: 0000-0003-0896-4536
URI:	https://livrepository.liverpool.ac.uk/id/eprint/3066707