Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe



Poolcharuansin, Phitsanu, Chingsungnoen, Artit, Pasaja, Nitisak, Horprathum, Mati and Bradley, James W
(2021) Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe. Vacuum, 194. p. 110549.

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Abstract

The flux of negative oxygen ions in a dc reactive magnetron discharge has been measured using a specially developed magnetic-filtering probe. The gridded probe which operates as a retarding field analyzer has a magnetic filter attached to the front entrance to suppress plasma electrons entering the device. As a result, the fluxes of unmagnetized negative ions with energies of higher than ~10 eV can arrive to an ion collector and contribute to the detected probe current. During the oxide mode of Ti–Ar/O2 magnetron sputtering discharge, the measured negative ion flux is considered to be contributed by the sputtered O− ions generated at the target surface and the plasma O− ions created in the discharge volume. However, in specific discharge conditions, the sputtered ions are likely to dominate in the measured flux signal. As a result, the yield of the sputtered O− ions and associated energy flux can be examined. The magnetic-filtering probe could potentially be employed as a real-time diagnostic tool to monitor the sputtered O− flux as well as the oxide state of the target surface during reactive magnetron sputtering processes.

Item Type: Article
Uncontrolled Keywords: Reactive magnetron sputtering, Negative ions, Ion flux probe, Target poisoning
Divisions: Faculty of Science and Engineering > School of Electrical Engineering, Electronics and Computer Science
Depositing User: Symplectic Admin
Date Deposited: 20 Sep 2021 08:02
Last Modified: 18 Jan 2023 21:28
DOI: 10.1016/j.vacuum.2021.110549
Related URLs:
URI: https://livrepository.liverpool.ac.uk/id/eprint/3137588