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Chalker, Paul Raymond ORCID: 0000-0002-2295-6332, Marshall, Paul A, Dawson, Karl ORCID: 0000-0003-3249-8328, Sutcliffe, Christopher J, Brunell, Ian F, Sedghi, Naser ORCID: 0000-0002-2004-6159, Hall, Stephen ORCID: 0000-0001-8387-1036 and Potter, Richard J ORCID: 0000-0003-0896-4536
(2015)
(Invited) Vacuum Ultraviolet Photochemical Atomic Layer Deposition of Alumina and Titania Films.
ECS Transactions, 69 (7).
pp. 139-145.