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O'Kane, Ruairi
(2007)
New precursors for the deposition of Hf02 and ZrO2 by MOCVD and ALD.
PhD thesis, University of Liverpool.
Up a level |
O'Kane, Ruairi
(2007)
New precursors for the deposition of Hf02 and ZrO2 by MOCVD and ALD.
PhD thesis, University of Liverpool.
Research Support, University of Liverpool
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