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Pham, Nam Hung
(2010)
Liquid-injection atomic layer deposition of cerium-doped hafnium oxide dielectric films.
PhD thesis, University of Liverpool.
Up a level |
Pham, Nam Hung
(2010)
Liquid-injection atomic layer deposition of cerium-doped hafnium oxide dielectric films.
PhD thesis, University of Liverpool.
Research Support, University of Liverpool
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