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Werner, Matthew, Roberts, Joseph W, Potter, Richard J ORCID: 0000-0003-0896-4536, Dawson, Karl ORCID: 0000-0003-3249-8328 and Chalker, Paul R ORCID: 0000-0002-2295-6332
(2018) Elucidation of ALD MgZnO deposition processes using low energy ion scattering. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 36 (2). 02d406-.


Kulczyk-Malecka, Justyna, Donaghy, David, Delfour-Peyrethon, Brice, Werner, Matthew, Chalker, Paul R ORCID: 0000-0002-2295-6332, Bradley, James W and Kelly, Peter J
(2020) Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process. Journal of Vacuum Science & Technology A, 38 (3). 033410-033410.

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