Babu, Swetha Suresh, Rudolph, Martin, Ryan, Peter John, Fischer, Joel, Lundin, Daniel, Bradley, James W and Gudmundsson, Jon Tomas
(2023)
High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results.
PLASMA SOURCES SCIENCE & TECHNOLOGY, 32 (3).
034003-034003.
|
Text
Suresh_Babu_2023_Plasma_Sources_Sci._Technol._32_034003.pdf - Open Access published version Download (1MB) | Preview |
Abstract
<jats:title>Abstract</jats:title> <jats:p>Here, we compare the ionization region model (IRM) against experimental measurements of particle densities and electron temperature in a high power impulse magnetron sputtering discharge with a tungsten target. The semi-empirical model provides volume-averaged temporal variations of the various species densities as well as the electron energy for a particular cathode target material, when given the measured discharge current and voltage waveforms. The model results are compared to the temporal evolution of the electron density and the electron temperature determined by Thomson scattering measurements and the temporal evolution of the relative neutral and ion densities determined by optical emission spectrometry. While the model underestimates the electron density and overestimates the electron temperature, the temporal trends of the species densities and the electron temperature are well captured by the IRM.</jats:p>
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | high power impulse magnetron sputtering, HiPIMS, magnetron sputtering, plasma chemistry, tungsten |
| Divisions: | Faculty of Science and Engineering > School of Electrical Engineering, Electronics and Computer Science |
| Depositing User: | Symplectic Admin |
| Date Deposited: | 03 Oct 2023 10:13 |
| Last Modified: | 03 Oct 2023 10:13 |
| DOI: | 10.1088/1361-6595/acc12f |
| Related URLs: | |
| URI: | https://livrepository.liverpool.ac.uk/id/eprint/3173352 |
Dimensions
Dimensions
